Proof-of-Concept Vacuum Microelectronic NOR Gate Fabricated Using Microelectromechanical Systems and Carbon Nanotube Field Emitters

Proof-of-Concept Vacuum Microelectronic NOR Gate Fabricated Using Microelectromechanical Systems and Carbon Nanotube Field Emitters

This paper demonstrates a fully integrated vacuum microelectronic NOR logic gate fabricated using microfabricated polysilicon panels oriented perpendicular to the device substrate with integrated carbon nanotube (CNT) field emission cathodes. The vacuum microelectronic NOR logic gate consists of two...

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Bibliographic Details
Main Authors: Tasso von Windheim, Kristin H. Gilchrist, Charles B. Parker, Stephen Hall, James B. Carlson, David Stokes, Nicholas G. Baldasaro, Charles T. Hess, Leif Scheick, Bernard Rax, Brian Stoner, Jeffrey T. Glass, Jason J. Amsden
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Micromachines
Subjects:
carbon nanotubes
field emission
logic gate
MEMS
vacuum microelectronics
Online Access:https://www.mdpi.com/2072-666X/14/5/973

Internet

https://www.mdpi.com/2072-666X/14/5/973

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