Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition
Silicon-carbon films are of great interest as diamond-like materials combining unique properties, e.g. high hardness, adhesion to a wide range of materials, abrasion resistance, chemical resistance, low friction coefficient and biocompatibility. The presence of silicon in the films significantly red...
| Main Authors: | , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Pensoft Publishers
2023-12-01
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| Series: | Modern Electronic Materials |
| Online Access: | https://moem.pensoft.net/article/116552/download/pdf/ |