Extending the Validity of Squeeze Film Damping Models with Lower Aspect Ratios

Extending the Validity of Squeeze Film Damping Models with Lower Aspect Ratios

Squeeze film air damping is a significant factor in the design of MEMS devices owing to its great impact on the dynamic performance of vibrating structures. However, the traditional theoretical results of squeeze film air damping are derived from the Reynolds equation, wherein there exists a deviati...

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Bibliographic Details
Main Authors: Xiang Xu, Weidong Fang, Jian Bai, Jiaxiao Chen, Yuan Yao, Qianbo Lu
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Sensors
Subjects:
MEMS
squeeze film air damping model
low aspect ratio
Reynolds equation
finite size effect
Online Access:https://www.mdpi.com/1424-8220/22/3/1054

Internet

https://www.mdpi.com/1424-8220/22/3/1054

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