A Novel Buckle‐Free Large Rib Microdisk with Submicrometer Thickness
Thin large microdisks, that are key to dense spectral microcomb generation at visible‐to‐UV wavelengths, face challenges in fabrication. One of the most difficult issues is the buckling effect that makes comb generation infeasible due to the severe degradation of cavity optical quality factor. Herei...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Wiley-VCH
2022-11-01
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Series: | Advanced Photonics Research |
Subjects: | |
Online Access: | https://doi.org/10.1002/adpr.202200178 |