Dielectric properties of thin-film metal/dielectric nanocomposites based on zirconium nitrides
Zirconium oxynitride films were synthesized by sputtering zirconium nitride with subsequent atmospheric annealing to oxynitride. The resulting films were studied by dielectric spectroscopy. It was shown that the annealing temperature affects the dielectric properties of the film. Atmospheric anneal...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Herzen State Pedagogical University of Russia
2024-12-01
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| Series: | Physics of Complex Systems |
| Subjects: | |
| Online Access: | https://physcomsys.ru/index.php/physcomsys/article/view/193 |