Semiconductor Physics, Quantum Electronics & Optoelectronics, 20 (1), P. 091-095 (2017). DOI: https://doi.org/10.15407/spqeo20.01.091 The influence of ethylene glycol on the chemical interaction of PbTe and Pb1–xSnxTe crystals with H2O2–HBr–ethylene glycol etching compositions
The process of cutting, mechanical and chemical treatment of the PbTe and Pb1–xSnxTe crystal surface has been studied. The dependences of the chemical-mechanical polishing rate versus dilution of the base polishing etchant H2O2–HBr–ethylene glycol by the ethylene glycol have been determined. The sur...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
National Academy of Sciences of Ukraine. Institute of Semi conductor physics.
2017-04-01
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Series: | Semiconductor Physics, Quantum Electronics & Optoelectronics |
Subjects: | |
Online Access: | http://journal-spqeo.org.ua/n1_2017/P091-095abstr.html |