Efficient multiphysics modeling of microelectromechanical switches
Circuit simulations driven modeling approach with embedded multi-physics of capacitive radio frequency microelectromechanical systems switches is presented in this paper. Finite element method simulations in electromagnetic, electromagnetic-thermal and thermal-stress domains are sequentially perform...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MULTIPHYSICS
2007-12-01
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| Series: | International Journal of Multiphysics |
| Online Access: | http://journal.multiphysics.org/index.php/IJM/article/view/37 |