Wireless Driving of a Micromirror Device by Electoromagnetic Excitation Tuned to Mechanical Resonance of Rotation

Wireless driving of a micromirror device is achieved by electromagnetic excitation tuned to the mechanical resonance of the mirror rotation. The micromirror used is designed for low-voltage-driving. Static mirror rotation angle is 7.7 deg. at 12 V bias. The micromirror is connected to a coil for rec...

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Bibliographic Details
Main Authors: Shinya KUMAGAI, Narimune OHNISHI, Minoru SASAKI
Format: Article
Language:English
Published: The Japan Society of Mechanical Engineers 2012-01-01
Series:Journal of Advanced Mechanical Design, Systems, and Manufacturing
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/jamdsm/6/1/6_1_179/_pdf/-char/en