Wireless Driving of a Micromirror Device by Electoromagnetic Excitation Tuned to Mechanical Resonance of Rotation
Wireless driving of a micromirror device is achieved by electromagnetic excitation tuned to the mechanical resonance of the mirror rotation. The micromirror used is designed for low-voltage-driving. Static mirror rotation angle is 7.7 deg. at 12 V bias. The micromirror is connected to a coil for rec...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
The Japan Society of Mechanical Engineers
2012-01-01
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Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
Subjects: | |
Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/6/1/6_1_179/_pdf/-char/en |