Scalloping and Stress Concentration in DRIE-Manufactured Comb-Drives
In the last decades, microelectromechanical systems have been increasing their number of degrees of freedom and their structural complexity. Hence, most recently designed MEMSs have required higher mobility than in the past and higher structural strength and stability. In some applications, device t...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-09-01
|
| Series: | Actuators |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2076-0825/7/3/57 |