Subsurface damage and phase transformation in laser-assisted nanometric cutting of single crystal silicon

Subsurface damage and phase transformation in laser-assisted nanometric cutting of single crystal silicon

Single crystal Si subsurface damage and phase transformation caused by laser-assisted nanometric cutting were investigated in this paper through the ultraprecision cutting experiments and molecular dynamics simulation. Post-cutting examination of a crystal's subsurface revealed a distorted SiI...

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Bibliographic Details
Main Authors: Xiao Chen, Changlin Liu, Jinyang Ke, Jianguo Zhang, Xuewen Shu, Jianfeng Xu
Format: Article
Language:English
Published: Elsevier 2020-05-01
Series:Materials & Design
Online Access:http://www.sciencedirect.com/science/article/pii/S0264127520300575

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http://www.sciencedirect.com/science/article/pii/S0264127520300575

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