Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages
A robust laser measurement system (LMS), consisting of a sensor head and a detecting part, for simultaneously measuring five-degree-of-freedom (five-DOF) error motions of linear stages, is proposed and characterized. For the purpose of long-travel measurement, all possible error sources that would a...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-09-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/19/18/3833 |