Modeling and random search optimization for the polysilicon CVD reactor

Modeling and random search optimization for the polysilicon CVD reactor

Polysilicon is mainly obtained by the Siemens process chemical vapor deposition (CVD) reaction, in which hydrogen gas and trichlorosilane (TCS) are fed into the CVD reactor to produce polysilicon. However, adjusting the feeding parameters in a step-by-step manner according to the actual deposition r...

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Bibliographic Details
Main Authors: Bangwen Xi, Gang Xiong, Kirill A. Kozin, Chang He, Tariku Sinshaw Tamir, Yonggang Song, Xiong Liu, Zhen Shen
Format: Article
Language:English
Published: Elsevier 2023-12-01
Series:Results in Control and Optimization
Subjects:
CVD reactor
Simulator
Random search
Nonlinear regression fitting
Online Access:http://www.sciencedirect.com/science/article/pii/S2666720723001224

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http://www.sciencedirect.com/science/article/pii/S2666720723001224

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