Buckle Driven Delamination in Thin Hard Film Compliant Substrate Systems
Deformation and fracture of thin films on compliant substrates are key factors constraining the performance of emerging flexible substrate devices. [1-3] These systems often contain layers of thin polymer, ceramic and metallic films and stretchable interconnects where differing properties induce...
Main Authors: | , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
EDP Sciences
2010-06-01
|
Series: | EPJ Web of Conferences |
Online Access: | http://dx.doi.org/10.1051/epjconf/20100640006 |