Editorial for the Special Issue on MEMS/NEMS Sensors: Fabrication and Application
MEMS sensors are currently undergoing a phase of exciting technological development, not only enabling advancements in traditional applications such as accelerometers and gyroscopes, but also in emerging applications such as microfluidics, thermoelectromechanical, and harsh environment sensors [...]
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-08-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/10/9/554 |