Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration

Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration

Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In this study, the nonlinear...

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Bibliographic Details
Main Authors: Chicheng Ma, Limin Cao, Lei Li, Mingyu Shao, Dong Jing, Zonghe Guo
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Micromachines
Subjects:
electrostatically actuated microbeam
coupled longitudinal–transversal vibration
pseudo-arclength continuation method
multiple-scales method
Online Access:https://www.mdpi.com/2072-666X/10/5/315

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https://www.mdpi.com/2072-666X/10/5/315

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