INFLUENCE OF THE PVD PROCESS PARAMETERS ON ZNO: AL THIN FILMS
In recent years a growing interest in searching new material for producing Transparent Conductive Layers (TLC) is observed. ZnO:Al thin films are this type material, interesting due to wide range of potential applications where it can be applied like: transparent electrodes, gas sensors, thin film t...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Serbian Academic Center
2017-03-01
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| Series: | Applied Engineering Letters |
| Subjects: | |
| Online Access: | https://www.aeletters.com/wp-content/uploads/2017/07/AEL00031.pdf |