Chamber with Inverted Electrode Geometry for Measuring and Control of Ion Flux-Energy Distribution Functions

Chamber with Inverted Electrode Geometry for Measuring and Control of Ion Flux-Energy Distribution Functions

Measurements of ion flux-energy distribution functions at the high sheath potential of the driven electrode in a classical low-pressure asymmetric capacitively coupled plasma are technically difficult as the diagnostic device needs to float with the applied radio frequency voltage. Otherwise, the io...

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Bibliographic Details
Main Authors: Christian Schulze, He Li, Leonie Mohn, Martin Müller, Jan Benedikt
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Plasma
Subjects:
capacitively coupled plasma
inductively coupled plasma
rf bias
ion energy distribution
energy-selective mass spectrometry
Online Access:https://www.mdpi.com/2571-6182/5/3/23

Internet

https://www.mdpi.com/2571-6182/5/3/23

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