A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (GP) modelling. Multiple output responses of t...

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Bibliographic Details
Main Authors: Shayaan Saghir, Muhammad Mubasher Saleem, Amir Hamza, Kashif Riaz, Sohail Iqbal, Rana Iqtidar Shakoor
Format: Article
Language:English
Published: MDPI AG 2021-10-01
Series:Sensors
Subjects:
microelectromechanical systems (MEMS)
design and analysis of computer experiments (DACE)
Gaussian process (GP)
finite element method (FEM)
multiphysics
optimization
Online Access:https://www.mdpi.com/1424-8220/21/21/7242

Internet

https://www.mdpi.com/1424-8220/21/21/7242

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