Correlation between luminescent properties and growth conditions for ZnO films grown on Si(100) by sputtering technique

Correlation between luminescent properties and growth conditions for ZnO films grown on Si(100) by sputtering technique

We report the effects of the growth condition on emission properties of ZnO films grown on Si (100) by rf magnetron sputtering. With increasing the O2/Ar+O2 ratio in the growing ambient, the visible emission in the room-temperature photoluminescence spectra (PL) was drastically suppressed without sa...

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Bibliographic Details
Main Authors: Sanghun Jeong, Chesin Lee
Format: Article
Language:English
Published: SpringerOpen 2011-09-01
Series:Journal of Analytical Science and Technology
Subjects:
Emission property
Growth condition
ZnO film
RF magnetron sputtering
Online Access:http://www.jastmag.org/journal/view.php?Type=C&number=38

Internet

http://www.jastmag.org/journal/view.php?Type=C&number=38

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