Spectroscopic study for plasma parameters in co-sputtering system
In this work the parameters of plasma (electron temperature Te, electron density ne, electron velocity and ion velocity) have been studied by using the spectrometer that collect the spectrum of plasma. Two cathodes were used (Si:Si) P-type and deposited on glass. In this research argon gas has been...
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| Format: | Article |
| Language: | English |
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University of Baghdad
2019-01-01
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| Series: | Iraqi Journal of Physics |
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| Online Access: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/179 |