Power optimization design of silicon microheater of mine-used MEMS methane sensor

Power optimization design of silicon microheater of mine-used MEMS methane sensor

Power optimization design of silicon microheater of mine-used MEMS methane sensor was carried out by use of ANSYS finite element software. Firstly, a calculation model of silicon resistivity within certain temperature range was built on basis of known doping concentration. Then an orthogonal test fo...

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Bibliographic Details
Main Authors: WANG Liying, QIN Shunli, MA Hongyu
Format: Article
Language:zho
Published: Editorial Department of Industry and Mine Automation 2018-10-01
Series:Gong-kuang zidonghua
Subjects:
coal mine safety
mems methane sensor
silicon microheater
power optimization
doping concentration
finite element analysis
orthogonal test
Online Access:http://www.gkzdh.cn/article/doi/10.13272/j.issn.1671-251x.2018030024

Internet

http://www.gkzdh.cn/article/doi/10.13272/j.issn.1671-251x.2018030024

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