Novel Test Fixture for Characterizing MEMS Switch Microcontact Reliability and Performance

Novel Test Fixture for Characterizing MEMS Switch Microcontact Reliability and Performance

In microelectromechanical systems (MEMS) switches, the microcontact is crucial in determining reliability and performance. In the past, actual MEMS devices and atomic force microscopes (AFM)/scanning probe microscopes (SPM)/nanoindentation-based test fixtures have been used to collect relevant micro...

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Bibliographic Details
Main Authors: Protap Mahanta, Farhana Anwar, Ronald A. Coutu
Format: Article
Language:English
Published: MDPI AG 2019-01-01
Series:Sensors
Subjects:
Microswitch
Microcontact
Test Fixture
Micromachining
Reliability
Online Access:https://www.mdpi.com/1424-8220/19/3/579

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https://www.mdpi.com/1424-8220/19/3/579

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