Effect of step-flow modulation on the large-size single crystal diamond through mosaic growth
In this paper, large-size single crystal diamond is grown by microwave plasma chemical vapor deposition using mosaic technique. The effects of the step-flow modulation on the surface morphology and crystal quality of epitaxial single crystal diamond layer are systematically investigated. It demonstr...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2023-12-01
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| Series: | Functional Diamond |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/26941112.2023.2279057 |