THERMAL OXIDATION AS A METHOD OF FORMATION OF NANOSCALE FUNCTIONAL FILMS ON AIIIBV SEMICONDUCTORS: INFLUENCE OF DEPOSITED METAL LAYERS OVERVIEW
Abstract. Considered the problems that do not allow to fully realize the enormous potential of application of indium phosphide and gallium arsenide in solid-state electronics.The classical and modern results of the thermal oxidation of AIIIBV semiconductors with consideration of process stimulation...
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| Format: | Article |
| Language: | English |
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Voronezh State University
2018-03-01
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| Series: | Конденсированные среды и межфазные границы |
| Subjects: |