Scalable Fabrication of Nanogratings on GaP for Efficient Diffraction of Near-Infrared Pulses and Enhanced Terahertz Generation by Optical Rectification

Scalable Fabrication of Nanogratings on GaP for Efficient Diffraction of Near-Infrared Pulses and Enhanced Terahertz Generation by Optical Rectification

We present a process flow for wafer-scale fabrication of a surface phase grating with sub-micron feature sizes from a single semiconductor material. We demonstrate this technique using a 110-oriented GaP semiconductor wafer with second-order nonlinearity to obtain a nanostructured device (800 nm lat...

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Bibliographic Details
Main Authors: Mohammad Bashirpour, Wei Cui, Angela Gamouras, Jean-Michel Ménard
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Crystals
Subjects:
photolithography
nanograting
gallium phosphide wafer
diffraction efficiency
time-resolved terahertz
Online Access:https://www.mdpi.com/2073-4352/12/5/684

Internet

https://www.mdpi.com/2073-4352/12/5/684

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