Enhanced process stability for the low temperature sputter deposition of aluminium nitride thin films
MEMS (micro electro-mechanical systems) operated in resonance and excited piezoelectrically are nowadays used for a broad range of different application scenarios. To enhance the process stability and hence, the reproducibility of key film parameters of sputter-deposited aluminium nitride such as th...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2018-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/aac9db |