Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers
Reduction in the adhesion energy of contacting metal electrode surfaces in nano-electro-mechanical switches is crucial for operation with low hysteresis voltage. We demonstrate that by forming thin layers of metal-oxides on metals such as Ru and W, the adhesion energy can be reduced by up to a facto...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-03-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.4978436 |