Microfabrication Process Development for a Polymer-Based Lab-on-Chip Concept Applied in Attenuated Total Reflection Fourier Transform Infrared Spectroelectrochemistry

Microfabrication Process Development for a Polymer-Based Lab-on-Chip Concept Applied in Attenuated Total Reflection Fourier Transform Infrared Spectroelectrochemistry

Micro electro-mechanical systems (MEMS) combining sensing and microfluidics functionalities, as are common in Lab-on-Chip (LoC) devices, are increasingly based on polymers. Benefits of polymers include tunable material properties, the possibility of surface functionalization, compatibility with many...

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Bibliographic Details
Main Authors: Noah Atkinson, Tyler A. Morhart, Garth Wells, Grace T. Flaman, Eric Petro, Stuart Read, Scott M. Rosendahl, Ian J. Burgess, Sven Achenbach
Format: Article
Language:English
Published: MDPI AG 2023-07-01
Series:Sensors
Subjects:
micro electro-mechanical systems (MEMS)
Lab-on-Chip (LoC)
microfabrication
polydimethylsiloxane (PMDS)
UV lithography
bonding
Online Access:https://www.mdpi.com/1424-8220/23/14/6251

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https://www.mdpi.com/1424-8220/23/14/6251

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