Accelerating the oxidation rate of AlN substrate through the addition of water vapor
To apply a pre-oxidation treatment on aluminum nitride (AlN) substrate is a common practice before its metallization. In the present study, the microstructure of AlN after oxidation either in dry air or in wet air is characterized. The resulting thermal conductivity is measured. With or without the...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2017-12-01
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| Series: | Journal of Asian Ceramic Societies |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2187076417300076 |