Validation of correction method for gap shape measurement by vertical-objective-type ellipsometric microscopy with rotating-compensator ellipsometry

Validation of correction method for gap shape measurement by vertical-objective-type ellipsometric microscopy with rotating-compensator ellipsometry

Correction method for improving the accuracy of gap shape measurement using vertical-objective-type ellipsometric microscopy (VEM) was investigated. This method can provide observation with 0.1-μm-order lateral resolution. Since VEM-based measurement uses an optical microscope with high lateral reso...

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Bibliographic Details
Main Authors: Katsuya NAMBA, Yusuke SASAO, Kenji FUKUZAWA, Shintaro ITOH, Hedong ZHANG
Format: Article
Language:English
Published: The Japan Society of Mechanical Engineers 2019-04-01
Series:Journal of Advanced Mechanical Design, Systems, and Manufacturing
Subjects:
nanometer gap
film thickness measurement
ellipsometry
tribology
contact mechanics
Online Access:https://www.jstage.jst.go.jp/article/jamdsm/13/2/13_2019jamdsm0025/_pdf/-char/en

Internet

https://www.jstage.jst.go.jp/article/jamdsm/13/2/13_2019jamdsm0025/_pdf/-char/en

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