Validation of correction method for gap shape measurement by vertical-objective-type ellipsometric microscopy with rotating-compensator ellipsometry
Correction method for improving the accuracy of gap shape measurement using vertical-objective-type ellipsometric microscopy (VEM) was investigated. This method can provide observation with 0.1-μm-order lateral resolution. Since VEM-based measurement uses an optical microscope with high lateral reso...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2019-04-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/13/2/13_2019jamdsm0025/_pdf/-char/en |