An Isotropic Areal Filter Based on High-Order Thin-Plate Spline for Surface Metrology
Isotropy, end effect suppression, calculation efficiency and robustness are basic requirements of areal filters for surface metrology. However, current areal filters cause problems in different aspects, which cripples the operation of surface metrology like roughness evaluation. In this paper, a hig...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8794800/ |