A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circu...

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Bibliographic Details
Main Authors: Angel Savov, Shivani Joshi, Salman Shafqat, Johan Hoefnagels, Marcus Louwerse, Ronald Stoute, Ronald Dekker
Format: Article
Language:English
Published: MDPI AG 2018-01-01
Series:Micromachines
Subjects:
stretchable electronics
stretchable interconnects
MEMS
mechanical characterization
electrical characterization
free standing interconnects
Online Access:http://www.mdpi.com/2072-666X/9/1/39

Internet

http://www.mdpi.com/2072-666X/9/1/39

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