A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects
A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circu...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2018-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/9/1/39 |
| _version_ | 1818922412722356224 |
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| author | Angel Savov Shivani Joshi Salman Shafqat Johan Hoefnagels Marcus Louwerse Ronald Stoute Ronald Dekker |
| author_facet | Angel Savov Shivani Joshi Salman Shafqat Johan Hoefnagels Marcus Louwerse Ronald Stoute Ronald Dekker |
| author_sort | Angel Savov |
| collection | DOAJ |
| description | A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circuits. For an easy, damage-free handling and mounting of these free-standing structures, the device is designed to be fabricated as a single chip/unit that is separated into two independently movable parts after it is fixed in the tensile test stage. Furthermore, the fabrication method allows for test structures of different geometries to be easily fabricated on the same substrate. The utility of the device has been demonstrated by stretching the free-standing interconnect structures in excess of 1000% while simultaneously measuring their electrical resistance. Important design considerations and encountered processing challenges and their solutions are discussed in this paper. |
| first_indexed | 2024-12-20T01:53:08Z |
| format | Article |
| id | doaj.art-fe39c0ecb0b84578a8dbee21dfe0186d |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-20T01:53:08Z |
| publishDate | 2018-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-fe39c0ecb0b84578a8dbee21dfe0186d2022-12-21T19:57:35ZengMDPI AGMicromachines2072-666X2018-01-01913910.3390/mi9010039mi9010039A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and InterconnectsAngel Savov0Shivani Joshi1Salman Shafqat2Johan Hoefnagels3Marcus Louwerse4Ronald Stoute5Ronald Dekker6Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The NetherlandsDepartment of Microelectronics, Delft University of Technology, 2628 CD Delft, The NetherlandsDepartment of Mechanical Engineering, Eindhoven University of Technology, 5600 MB Eindhoven, The NetherlandsDepartment of Mechanical Engineering, Eindhoven University of Technology, 5600 MB Eindhoven, The NetherlandsPhilips Research, High Tech Campus 4, 5654 AE Eindhoven, The NetherlandsDepartment of Microelectronics, Delft University of Technology, 2628 CD Delft, The NetherlandsDepartment of Microelectronics, Delft University of Technology, 2628 CD Delft, The NetherlandsA device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circuits. For an easy, damage-free handling and mounting of these free-standing structures, the device is designed to be fabricated as a single chip/unit that is separated into two independently movable parts after it is fixed in the tensile test stage. Furthermore, the fabrication method allows for test structures of different geometries to be easily fabricated on the same substrate. The utility of the device has been demonstrated by stretching the free-standing interconnect structures in excess of 1000% while simultaneously measuring their electrical resistance. Important design considerations and encountered processing challenges and their solutions are discussed in this paper.http://www.mdpi.com/2072-666X/9/1/39stretchable electronicsstretchable interconnectsMEMSmechanical characterizationelectrical characterizationfree standing interconnects |
| spellingShingle | Angel Savov Shivani Joshi Salman Shafqat Johan Hoefnagels Marcus Louwerse Ronald Stoute Ronald Dekker A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects Micromachines stretchable electronics stretchable interconnects MEMS mechanical characterization electrical characterization free standing interconnects |
| title | A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects |
| title_full | A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects |
| title_fullStr | A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects |
| title_full_unstemmed | A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects |
| title_short | A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects |
| title_sort | platform for mechano electrical characterization of free standing micron sized structures and interconnects |
| topic | stretchable electronics stretchable interconnects MEMS mechanical characterization electrical characterization free standing interconnects |
| url | http://www.mdpi.com/2072-666X/9/1/39 |
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