System-Level Fault Diagnosis for an Industrial Wafer Transfer Robot with Multi-Component Failure Modes

In the manufacturing industry, robots are constantly operated at high speed, which degrades their performance by the degradation of internal components, eventually reaching failure. To address this issue, a framework for system-level fault diagnosis is proposed, which consists of extracting useful f...

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Bibliographic Details
Main Authors: Inu Lee, Hyung Jun Park, Jae-Won Jang, Chang-Woo Kim, Joo-Ho Choi
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/13/18/10243