System-Level Fault Diagnosis for an Industrial Wafer Transfer Robot with Multi-Component Failure Modes
In the manufacturing industry, robots are constantly operated at high speed, which degrades their performance by the degradation of internal components, eventually reaching failure. To address this issue, a framework for system-level fault diagnosis is proposed, which consists of extracting useful f...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-09-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/13/18/10243 |