APA (7th ed.) Citation

Wang, F., Cheng, L., & Liang, S. (2020). Study on thermodynamics and kinetics of chemical vapor deposition of silicon nitride. IOP Publishing.

Chicago Style (17th ed.) Citation

Wang, Fuyuan, Laifei Cheng, and Shuhua Liang. Study on Thermodynamics and Kinetics of Chemical Vapor Deposition of Silicon Nitride. IOP Publishing, 2020.

MLA (9th ed.) Citation

Wang, Fuyuan, et al. Study on Thermodynamics and Kinetics of Chemical Vapor Deposition of Silicon Nitride. IOP Publishing, 2020.