Design and Performance of a Spatial 6-<u>R</u>RRR Compliant Parallel Nanopositioning Stage
Piezoelectric actuators (PEAs) and compliant parallel mechanisms (CPMs) are advantageous for designing nanopositioning stages (NPSs) with multiple degrees of freedom (multi-DOFs). This paper proposes a new NPS that uses PEAs and CPMs with multiple spatial DOFs. First, the design of the mechanism is...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-11-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/11/1889 |