Design and Performance of a Spatial 6-<u>R</u>RRR Compliant Parallel Nanopositioning Stage
Piezoelectric actuators (PEAs) and compliant parallel mechanisms (CPMs) are advantageous for designing nanopositioning stages (NPSs) with multiple degrees of freedom (multi-DOFs). This paper proposes a new NPS that uses PEAs and CPMs with multiple spatial DOFs. First, the design of the mechanism is...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/11/1889 |
| _version_ | 1827646112646823936 |
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| author | Ruizhou Wang Heng Wu |
| author_facet | Ruizhou Wang Heng Wu |
| author_sort | Ruizhou Wang |
| collection | DOAJ |
| description | Piezoelectric actuators (PEAs) and compliant parallel mechanisms (CPMs) are advantageous for designing nanopositioning stages (NPSs) with multiple degrees of freedom (multi-DOFs). This paper proposes a new NPS that uses PEAs and CPMs with multiple spatial DOFs. First, the design of the mechanism is introduced. Six parallel kinematics <span style="text-decoration: underline;">revolute</span>-revolute-revolute-revolute (<span style="text-decoration: underline;">R</span>RRR) branched chains were used to create a 6-<span style="text-decoration: underline;">R</span>RRR CPM for superior mechanical performance. Three in-plane and three out-of-plane chains were combined using a two-in-one structure to ensure fabrication feasibility. A two-in-one 6-<span style="text-decoration: underline;">R</span>RRR CPM was employed to build the proposed NPS. Second, the mechanical performance was analyzed. High-efficiency finite-element modeling approaches were derived using the compliance-based matrix method (CMM) and a pseudo-rigid body model (PRBM). The model included both 6-<span style="text-decoration: underline;">R</span>RRR CPM and NPS. The simulation results validated the static and dynamic performance, and the experimental results verified the kinematics. Based on the newly designed mechanism and verified mechanical performance, the proposed 6-<span style="text-decoration: underline;">R</span>RRR NPS contributes to the development of spatial multi-DOF NPSs using PEAs and CPMs. |
| first_indexed | 2024-03-09T18:50:29Z |
| format | Article |
| id | doaj.art-fe99139b19ae4f45b430c7b070c8a460 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T18:50:29Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-fe99139b19ae4f45b430c7b070c8a4602023-11-24T05:54:46ZengMDPI AGMicromachines2072-666X2022-11-011311188910.3390/mi13111889Design and Performance of a Spatial 6-<u>R</u>RRR Compliant Parallel Nanopositioning StageRuizhou Wang0Heng Wu1State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaGuangdong Provincial Key Laboratory of Cyber-Physical System, Guangdong University of Technology, Guangzhou 510006, ChinaPiezoelectric actuators (PEAs) and compliant parallel mechanisms (CPMs) are advantageous for designing nanopositioning stages (NPSs) with multiple degrees of freedom (multi-DOFs). This paper proposes a new NPS that uses PEAs and CPMs with multiple spatial DOFs. First, the design of the mechanism is introduced. Six parallel kinematics <span style="text-decoration: underline;">revolute</span>-revolute-revolute-revolute (<span style="text-decoration: underline;">R</span>RRR) branched chains were used to create a 6-<span style="text-decoration: underline;">R</span>RRR CPM for superior mechanical performance. Three in-plane and three out-of-plane chains were combined using a two-in-one structure to ensure fabrication feasibility. A two-in-one 6-<span style="text-decoration: underline;">R</span>RRR CPM was employed to build the proposed NPS. Second, the mechanical performance was analyzed. High-efficiency finite-element modeling approaches were derived using the compliance-based matrix method (CMM) and a pseudo-rigid body model (PRBM). The model included both 6-<span style="text-decoration: underline;">R</span>RRR CPM and NPS. The simulation results validated the static and dynamic performance, and the experimental results verified the kinematics. Based on the newly designed mechanism and verified mechanical performance, the proposed 6-<span style="text-decoration: underline;">R</span>RRR NPS contributes to the development of spatial multi-DOF NPSs using PEAs and CPMs.https://www.mdpi.com/2072-666X/13/11/1889piezoelectric actuatorscompliant parallel mechanismsnanopositioning stages |
| spellingShingle | Ruizhou Wang Heng Wu Design and Performance of a Spatial 6-<u>R</u>RRR Compliant Parallel Nanopositioning Stage Micromachines piezoelectric actuators compliant parallel mechanisms nanopositioning stages |
| title | Design and Performance of a Spatial 6-<u>R</u>RRR Compliant Parallel Nanopositioning Stage |
| title_full | Design and Performance of a Spatial 6-<u>R</u>RRR Compliant Parallel Nanopositioning Stage |
| title_fullStr | Design and Performance of a Spatial 6-<u>R</u>RRR Compliant Parallel Nanopositioning Stage |
| title_full_unstemmed | Design and Performance of a Spatial 6-<u>R</u>RRR Compliant Parallel Nanopositioning Stage |
| title_short | Design and Performance of a Spatial 6-<u>R</u>RRR Compliant Parallel Nanopositioning Stage |
| title_sort | design and performance of a spatial 6 u r u rrr compliant parallel nanopositioning stage |
| topic | piezoelectric actuators compliant parallel mechanisms nanopositioning stages |
| url | https://www.mdpi.com/2072-666X/13/11/1889 |
| work_keys_str_mv | AT ruizhouwang designandperformanceofaspatial6ururrrcompliantparallelnanopositioningstage AT hengwu designandperformanceofaspatial6ururrrcompliantparallelnanopositioningstage |