Evaluation of sample temperature and applied power on degradation of stearic acid in inductively coupled radio frequency plasma
Plasma cleaning is a promising technology in surface treatments, despite technological interest its use is limited because its mechanisms still are not entirely understood. This work aims to evaluate how the applied power of an inductively coupled RF discharge at 13,56 MHz, with Ar and Ar+10%O2 atmo...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)
2014-10-01
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| Series: | Materials Research |
| Subjects: | |
| Online Access: | http://www.scielo.br/pdf/mr/v17n5/aop_matres_270714.pdf |