Molecular Dynamics Simulation of Adhesion Effect on Material Removal and Tool Wear in Diamond Grinding of Silicon Wafer

Molecular Dynamics Simulation of Adhesion Effect on Material Removal and Tool Wear in Diamond Grinding of Silicon Wafer

This study aims to clarify the interaction between a silicon wafer and individual diamond abrasives in grinding to support the estimation of optimal grinding conditions for minimizing the subsurface damages and maximizing the removal rate. In this paper, the effects of adhesion (or lubrication) betw...

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Bibliographic Details
Main Authors: Jun Shimizu, Hiroshi Eda, Libo Zhou, Hidemitsu Okabe
Format: Article
Language:English
Published: Japanese Society of Tribologists 2008-10-01
Series:Tribology Online
Subjects:
silicon wafer
diamond abrasive
grinding
adhesion
subsurface damage
tool wear
molecular dynamics
interatomic potential
Online Access:https://www.jstage.jst.go.jp/article/trol/3/5/3_5_248/_pdf/-char/en

Internet

https://www.jstage.jst.go.jp/article/trol/3/5/3_5_248/_pdf/-char/en

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