Structural Analysis of Mo Thin Films on Sapphire Substrates for Epitaxial Growth of AlN
Aluminum nitride (AlN) thin film/molybdenum (Mo) electrode structures are typically required in microelectromechanical system applications. However, the growth of highly crystalline and <i>c</i>-axis-oriented AlN thin films on Mo electrodes remains challenging. In this study, we demonstr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/5/966 |