Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing

Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing

Single-crystal sapphire specimen (α-Al<sub>2</sub>O<sub>3</sub>) have been widely applied in the semiconductor industry, microelectronics, and so on. In order to shorten the production time and improve the processing efficiency of sapphire processing, an integrated fixed-abra...

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Bibliographic Details
Main Authors: Linlin Cao, Xiaolong Zhou, Yingjie Wang, Zhilun Yang, Duowen Chen, Wei Wei, Kaibao Wang
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Micromachines
Subjects:
sapphire wafer
fixed-abrasive tool
surface roughness
material removal rate
lapping and polishing
Online Access:https://www.mdpi.com/2072-666X/14/9/1797

Internet

https://www.mdpi.com/2072-666X/14/9/1797

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