Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/...

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Bibliographic Details
Main Authors: Weiping Zhang, Xiaosheng Wu, Wenyuan Chen, Wu Liu, Feng Cui
Format: Article
Language:English
Published: MDPI AG 2011-11-01
Series:Sensors
Subjects:
MEMS accelerometer
electrostatic suspension
six-axis
hybrid microfabrication
UV-LIGA
SU-8
levitation
Online Access:http://www.mdpi.com/1424-8220/11/12/11206/

Internet

http://www.mdpi.com/1424-8220/11/12/11206/

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