Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer
A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/...
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| Format: | Article |
| Language: | English |
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MDPI AG
2011-11-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/11/12/11206/ |
| _version_ | 1798026641729912832 |
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| author | Weiping Zhang Xiaosheng Wu Wenyuan Chen Wu Liu Feng Cui |
| author_facet | Weiping Zhang Xiaosheng Wu Wenyuan Chen Wu Liu Feng Cui |
| author_sort | Weiping Zhang |
| collection | DOAJ |
| description | A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micromachining fabrication of thin film electrodes and interconnections, integration fabrication of thick nickel structures about 500 μm using UV-LIGA by successful removal of SU-8 photoresist mold, DRIE of silicon proof mass in thickness of 450 μm, microassembly and solder bonding, were employed to fabricate this prototype microdevice. A levitation experiment system for the fabricated microaccelerometer chip is introduced, and levitation results show that fast initial levitation within 10 ms and stable full suspension of the proof mass have been successfully demonstrated. |
| first_indexed | 2024-04-11T18:39:14Z |
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| id | doaj.art-ff91c81d5a6240f7ae27fc423234771f |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T18:39:14Z |
| publishDate | 2011-11-01 |
| publisher | MDPI AG |
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| series | Sensors |
| spelling | doaj.art-ff91c81d5a6240f7ae27fc423234771f2022-12-22T04:09:04ZengMDPI AGSensors1424-82202011-11-011112112061123410.3390/s111211206Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis AccelerometerWeiping ZhangXiaosheng WuWenyuan ChenWu LiuFeng CuiA micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micromachining fabrication of thin film electrodes and interconnections, integration fabrication of thick nickel structures about 500 μm using UV-LIGA by successful removal of SU-8 photoresist mold, DRIE of silicon proof mass in thickness of 450 μm, microassembly and solder bonding, were employed to fabricate this prototype microdevice. A levitation experiment system for the fabricated microaccelerometer chip is introduced, and levitation results show that fast initial levitation within 10 ms and stable full suspension of the proof mass have been successfully demonstrated.http://www.mdpi.com/1424-8220/11/12/11206/MEMS accelerometerelectrostatic suspensionsix-axishybrid microfabricationUV-LIGASU-8levitation |
| spellingShingle | Weiping Zhang Xiaosheng Wu Wenyuan Chen Wu Liu Feng Cui Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer Sensors MEMS accelerometer electrostatic suspension six-axis hybrid microfabrication UV-LIGA SU-8 levitation |
| title | Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer |
| title_full | Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer |
| title_fullStr | Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer |
| title_full_unstemmed | Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer |
| title_short | Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer |
| title_sort | design fabrication and levitation experiments of a micromachined electrostatically suspended six axis accelerometer |
| topic | MEMS accelerometer electrostatic suspension six-axis hybrid microfabrication UV-LIGA SU-8 levitation |
| url | http://www.mdpi.com/1424-8220/11/12/11206/ |
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