Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

The laser–produced plasma extreme ultraviolet (LPP–EUV) source is the sole light source currently available for commercial EUVL (extreme ultraviolet lithography) machines. The plasma parameters, such as the electron temperature and electron density, affect the conversion efficiency (CE) of extreme u...

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Bibliographic Details
Main Authors: Yiyi Chen, Chongxiao Zhao, Qikun Pan, Ranran Zhang, Yang Gao, Xiaoxi Li, Jin Guo, Fei Chen
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Photonics
Subjects:
LPP–EUV
laser–produced tin plasma
plasma parameters
time–resolved spectra
Online Access:https://www.mdpi.com/2304-6732/10/12/1339

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https://www.mdpi.com/2304-6732/10/12/1339

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