Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source
The laser–produced plasma extreme ultraviolet (LPP–EUV) source is the sole light source currently available for commercial EUVL (extreme ultraviolet lithography) machines. The plasma parameters, such as the electron temperature and electron density, affect the conversion efficiency (CE) of extreme u...
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MDPI AG
2023-12-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/10/12/1339 |
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| author | Yiyi Chen Chongxiao Zhao Qikun Pan Ranran Zhang Yang Gao Xiaoxi Li Jin Guo Fei Chen |
| author_facet | Yiyi Chen Chongxiao Zhao Qikun Pan Ranran Zhang Yang Gao Xiaoxi Li Jin Guo Fei Chen |
| author_sort | Yiyi Chen |
| collection | DOAJ |
| description | The laser–produced plasma extreme ultraviolet (LPP–EUV) source is the sole light source currently available for commercial EUVL (extreme ultraviolet lithography) machines. The plasma parameters, such as the electron temperature and electron density, affect the conversion efficiency (CE) of extreme ultraviolet radiation and other critical parameters of LPP–EUV source directly. In this paper, the optical emission spectroscopy (OES) was employed to investigate the time–resolved plasma parameters generated by an Nd:YAG laser irradiation on a planar tin target. Assuming that the laser–produced tin plasma satisfies the local thermodynamic equilibrium (LTE) condition, the electron temperature and electron density of the plasma were calculated by the Saha–Boltzmann plot and Stark broadening methods. The experimental results revealed that during the early stage of plasma formation (delay time < 50 ns), there was a significant presence of continuum emission. Subsequently, the intensity of the continuum emission gradually decreased, while line spectra emerged and became predominant at a delay time of 300 ns. In addition, the evolution trend of plasma parameters, with the incident laser pulse energy set at 300 mJ, was characterized by a rapid initial decrease followed by a gradual decline as the delay time increased. Furthermore, with an increase in the incident laser pulse energy from 300 mJ to 750 mJ, the electron temperature and electron density of laser–produced tin plasma exhibiting a monotonically showed increasing trend at the same delay time. |
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| language | English |
| last_indexed | 2024-03-08T20:26:35Z |
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| spelling | doaj.art-ff9bdafc40454702832103b7a110b5722023-12-22T14:32:50ZengMDPI AGPhotonics2304-67322023-12-011012133910.3390/photonics10121339Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV SourceYiyi Chen0Chongxiao Zhao1Qikun Pan2Ranran Zhang3Yang Gao4Xiaoxi Li5Jin Guo6Fei Chen7State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, ChinaState Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, ChinaState Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, ChinaState Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, ChinaState Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, ChinaState Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, ChinaState Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, ChinaState Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, ChinaThe laser–produced plasma extreme ultraviolet (LPP–EUV) source is the sole light source currently available for commercial EUVL (extreme ultraviolet lithography) machines. The plasma parameters, such as the electron temperature and electron density, affect the conversion efficiency (CE) of extreme ultraviolet radiation and other critical parameters of LPP–EUV source directly. In this paper, the optical emission spectroscopy (OES) was employed to investigate the time–resolved plasma parameters generated by an Nd:YAG laser irradiation on a planar tin target. Assuming that the laser–produced tin plasma satisfies the local thermodynamic equilibrium (LTE) condition, the electron temperature and electron density of the plasma were calculated by the Saha–Boltzmann plot and Stark broadening methods. The experimental results revealed that during the early stage of plasma formation (delay time < 50 ns), there was a significant presence of continuum emission. Subsequently, the intensity of the continuum emission gradually decreased, while line spectra emerged and became predominant at a delay time of 300 ns. In addition, the evolution trend of plasma parameters, with the incident laser pulse energy set at 300 mJ, was characterized by a rapid initial decrease followed by a gradual decline as the delay time increased. Furthermore, with an increase in the incident laser pulse energy from 300 mJ to 750 mJ, the electron temperature and electron density of laser–produced tin plasma exhibiting a monotonically showed increasing trend at the same delay time.https://www.mdpi.com/2304-6732/10/12/1339LPP–EUVlaser–produced tin plasmaplasma parameterstime–resolved spectra |
| spellingShingle | Yiyi Chen Chongxiao Zhao Qikun Pan Ranran Zhang Yang Gao Xiaoxi Li Jin Guo Fei Chen Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source Photonics LPP–EUV laser–produced tin plasma plasma parameters time–resolved spectra |
| title | Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source |
| title_full | Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source |
| title_fullStr | Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source |
| title_full_unstemmed | Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source |
| title_short | Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source |
| title_sort | experimental study on the temporal evolution parameters of laser produced tin plasma under different laser pulse energies for lpp euv source |
| topic | LPP–EUV laser–produced tin plasma plasma parameters time–resolved spectra |
| url | https://www.mdpi.com/2304-6732/10/12/1339 |
| work_keys_str_mv | AT yiyichen experimentalstudyonthetemporalevolutionparametersoflaserproducedtinplasmaunderdifferentlaserpulseenergiesforlppeuvsource AT chongxiaozhao experimentalstudyonthetemporalevolutionparametersoflaserproducedtinplasmaunderdifferentlaserpulseenergiesforlppeuvsource AT qikunpan experimentalstudyonthetemporalevolutionparametersoflaserproducedtinplasmaunderdifferentlaserpulseenergiesforlppeuvsource AT ranranzhang experimentalstudyonthetemporalevolutionparametersoflaserproducedtinplasmaunderdifferentlaserpulseenergiesforlppeuvsource AT yanggao experimentalstudyonthetemporalevolutionparametersoflaserproducedtinplasmaunderdifferentlaserpulseenergiesforlppeuvsource AT xiaoxili experimentalstudyonthetemporalevolutionparametersoflaserproducedtinplasmaunderdifferentlaserpulseenergiesforlppeuvsource AT jinguo experimentalstudyonthetemporalevolutionparametersoflaserproducedtinplasmaunderdifferentlaserpulseenergiesforlppeuvsource AT feichen experimentalstudyonthetemporalevolutionparametersoflaserproducedtinplasmaunderdifferentlaserpulseenergiesforlppeuvsource |