CC-De-YOLO: A Multiscale Object Detection Method for Wafer Surface Defect
Surface defect detection on wafers is crucial for quality control in semiconductor manufacturing. However, the complexity of defect spatial features, including mixed defect types, large scale differences, and overlapping, results in low detection accuracy. In this paper, we propose a CC-De-YOLO mode...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sciendo
2024-09-01
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| Series: | Foundations of Computing and Decision Sciences |
| Subjects: | |
| Online Access: | https://doi.org/10.2478/fcds-2024-0014 |