A general methodology for assessing and characterizing variation in semiconductor manufacturing

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author:	Stine, Brian E. (Brian Eugene), 1971-
Other Authors:	Duane S. Bonging, James E. Chung.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/10045

Internet

http://hdl.handle.net/1721.1/10045