A general methodology for assessing and characterizing variation in semiconductor manufacturing

A general methodology for assessing and characterizing variation in semiconductor manufacturing

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author: Stine, Brian E. (Brian Eugene), 1971-
Other Authors: Duane S. Bonging, James E. Chung.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/10045

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